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发明名称
EXPOSURE DEVICE
摘要
申请公布号
JPH03155113(A)
申请公布日期
1991.07.03
申请号
JP19890293864
申请日期
1989.11.14
申请人
CANON INC
发明人
OZAWA KUNITAKA;OTA HIROHISA;MORI MAKIKO;UZAWA SHUNICHI;NOSE TETSUSHI
分类号
H01L21/30;G03F7/20;H01L21/027
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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