| 摘要 |
An apparatus and method for processing cylindrical and belt-like substrates (18) includes a carousel (10) rotatable to any one of a plurality of planetary stations (100, 200, 300, 400) surrounding the carousel, the carousel having a support structure (14) defining a central horizontal axis (H) and at least one support arm (16) mounted on the support structure for supporting a substrate (18) thereon along a horizontal axis (h) parallel to and radially offset from the central horizontal axis. The support structure reciprocates relative to any one of the plurality of stations to insert the substrate into and withdraw the substrate from any one of the plurality of stations, and the at least one support arm (16) is rotatable about its offset horizontal axis (h) to rotate the substrate (18) thereon. A loading station (100) is located at a first position of the carousel for placing a substrate on the support arm; a cleaning station (200) is located at a second position of the carousel, the cleaning station including a cleaning chamber for receiving the at least one support arm bearing the substrate and having decontaminating means for removing contaminants from the substrate; a coating station (300) is located at a third position of the carousel, the coating station including a coating chamber for receiving the at least one support arm bearing the substrate and having an applicator aligned with the central horizontal axis of the support structure for applying a coating formulation radially outward onto the substrate; and a curing station (400) is located at a fourth position of the carousel, the curing station including a curing chamber for receiving the at least one support arm bearing the substrate and having curing means for curing the coating on the substrate. Preferably, the support structure (14) includes a plurality of support arms (16) arranged in a planetary array about the central horizontal axis (H) of the support structure. <IMAGE>
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