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发明名称
IMPROVED PLASMA REACTOR APPARATUS AND METHOD FOR TREATING A SUBSTRATE
摘要
申请公布号
EP0388800(A3)
申请公布日期
1991.07.03
申请号
EP19900104938
申请日期
1990.03.15
申请人
THE BOARD OF TRUSTEES OF THE MICHIGAN STATE UNIVERSITY
发明人
ASMUSSEN, JES;REINHARD, DONNIE K.
分类号
B01J19/08;C23C16/27;C23C16/452;C23C16/50;C23C16/505;C23C16/511;C23C16/52;H01J37/32;(IPC1-7):H01J37/32;H05H1/46
主分类号
B01J19/08
代理机构
代理人
主权项
地址
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