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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03155156(A)
申请公布日期
1991.07.03
申请号
JP19890294610
申请日期
1989.11.13
申请人
SEIKO EPSON CORP
发明人
SASE YASUKI
分类号
H01L29/78;H01L21/8234;H01L27/088
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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