ELECTRON BEAM DRAWING,申请号JP19890294724-传众专利搜索

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发明名称	ELECTRON BEAM DRAWING
摘要
申请公布号	JPH03155121(A)	申请公布日期	1991.07.03
申请号	JP19890294724	申请日期	1989.11.13
申请人	NIPPON TELEGR & TELEPH CORP <NTT>	发明人	MOROSAWA TETSUO;FUJINAMI AKIHIRA
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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