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发明名称
MANUFACTURE OF MOS TYPE SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03155640(A)
申请公布日期
1991.07.03
申请号
JP19890295519
申请日期
1989.11.14
申请人
SEIKO EPSON CORP
发明人
MOROZUMI YUKIO
分类号
H01L21/336;H01L21/8234;H01L27/06;H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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