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发明名称
ION IMPLANTING METHOD
摘要
申请公布号
JPH03155616(A)
申请公布日期
1991.07.03
申请号
JP19890295445
申请日期
1989.11.14
申请人
SUMITOMO ELECTRIC IND LTD
发明人
KATO MASAHIRO
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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