| 摘要 |
PURPOSE:To accurately measure the surface temperature of a chip by using a P-N junction diode which is parasitic between terminals of an IC as a diode for temperature measurement. CONSTITUTION:A signal generator 26 is turned off to make the IC 10 inactive and the potential difference between the terminals 36 and 38 is measured by supplying a specific forward current from a constant-current source 22 to the P-N junction diode 12 at various ambient temperatures, thereby determining the temperature coefficient of the diode 12. Then the signal generator 26 is turned on to activate the IC 10 and turned off when the chip surface temperature becomes balanced; and the constant forward current is supplied to the diode 12 right after that and the potential difference between the terminals is measured to estimate the temperature in operation from the potential difference between the terminals of the diode 12 which is not in operation, the quantity of variation in the terminal potential difference, and the temperature coefficient. Therefore, a means for temperature measurement need not be provided newly and the chip surface temperature can easily and accurately be measured. |
