| 摘要 |
PURPOSE:To facilitate the measurement of transmittivity of a pellicle installed in a photomask by providing a reflecting plate on the photomask surface of an area covered with the pellicle. CONSTITUTION:A pellicle frame 12 to which a pellicle 11 is stuck is stuck to a photomask 13, and to the outside of a patterning part 14 of the mask 13, a reflecting plate 15 is attached. In this regard, it is desirable to use a dielectric mirror for the reflecting plate 15. In such a way, by reflecting an incident light from the pellicle 11 by the reflecting plate 15, and measuring the intensity of a reflected light, transmittivity of the pellicle 11 can be calculated. |
