| 摘要 |
A one or two dimensional integrated array of multiple-wavelength, vertical-cavity lasers and its method of making. All lasers are simultaneously formed on a common substrate by the sequential vertical growth of a lower reflector, a lower spacer, an active light emitting region, an upper spacer and an upper reflector. Resonant cavities are formed between the upper and lower reflectors, the optical lengths of which determine the lasing wavelengths. According to the invention, during the growth of at least part of this vertical structure, the growth is made controllably non-uniform over the substrate, thereby providing a spatial variation over the substrate of the resonant cavity length. Such non-uniform deposition may be achieved by deposition from an off-normal source onto a stationary substrate, by thermal gradients in the substrate or by diffusion limited growth onto mesas or valleys of different widths.
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