PLASMA ION SPUTTERING DEVICE FOR ELECTRON MICROSCOPE SAMPLE,申请号JP19890293420-传众专利搜索

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发明名称	PLASMA ION SPUTTERING DEVICE FOR ELECTRON MICROSCOPE SAMPLE
摘要
申请公布号	JPH03153870(A)	申请公布日期	1991.07.01
申请号	JP19890293420	申请日期	1989.11.11
申请人	SHINKU DEVICE:KK	发明人	AKAHORI HIROSHI
分类号	C23C14/34;H01J37/20	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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