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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03153019(A)
申请公布日期
1991.07.01
申请号
JP19890292610
申请日期
1989.11.10
申请人
SEIKO EPSON CORP
发明人
KOGA KAZUO
分类号
H01L21/302;H01L21/027;H01L21/265;H01L21/266
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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