发明名称 |
DEVICE FOR VACUUM TREATMENT AND DEVICE FOR AND METHOD OF FILM FORMATION USING SAID DEVICE |
摘要 |
A vacuum treatment device for conducting various treatments of wafers in a vacuum tank and a method of film formation using said device, which is characterized in that temperature control of the wafers during film formation is performed using a radiation thermometer and, in particular, wafers are conveyed to each stage in a vacuum film forming chamber after emissivities thereof are corrected by a temperature correction stage in combination with the shutter, and are temperature-controlled to a fixed temperature to form a film thereon. |
申请公布号 |
WO9109148(A1) |
申请公布日期 |
1991.06.27 |
申请号 |
WO1990JP01601 |
申请日期 |
1990.12.10 |
申请人 |
HITACHI, LTD. |
发明人 |
OKAMOTO, AKIRA;KOBAYASHI, SHIGERU;SHIMAMURA, HIDEAKI;TSUZUKU, SUSUMU;NISHITANI, EISUKE;KISHIMOTO, SATOSHI;YONEOKA, YUJI |
分类号 |
C23C14/50;C23C14/54;C23C14/56;C23C16/458;C23C16/46;H01L21/00;H01L21/683 |
主分类号 |
C23C14/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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