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经营范围
发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03151651(A)
申请公布日期
1991.06.27
申请号
JP19890291612
申请日期
1989.11.08
申请人
MITSUBISHI ELECTRIC CORP
发明人
ISHIKAWA MASAHIKO;FUDEYASU YOSHIO
分类号
G01N21/66;H01L21/66
主分类号
G01N21/66
代理机构
代理人
主权项
地址
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