摘要 |
PURPOSE:To enable the existence of the abnormality in the vacuum degree to be easily checked every time by exhausting both a bulb, which is fitted with a metal filament, and a cathode-ray tube simultaneously by means of an exhaustion cart, and detecting the abnormality in the vacuum degree according to the oxidation degree of the said filament which is heated by feeding current to it. CONSTITUTION:An exhaustion system consists of an oil rotation pump 2, an oil diffusion pump 3 and a cathode-ray tube attaching part 4. A filament 9 is installed within a route provided between the pump 3 and the part 4, and is provided with terminals 11 which are used for heating the filament 9 by feeding current to it. The filament 9 is charged in a bulb 10, and the bulb 10 is made to be vacuumed at the same time when a tube 8 is exhausted. Owing to the above constitution, the existence of the abnormality in the vacuum degree can be easily checked every time according to the oxidation degree of the filament 9 made of metal. Consequently, any defective cart can be found at an early stage, and the yield can be greatly enhanced. |