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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH03151660(A)
申请公布日期
1991.06.27
申请号
JP19890290061
申请日期
1989.11.09
申请人
TOSHIBA CORP
发明人
SUGAO TAKESHI
分类号
H01L21/822;H01L27/04;H01L27/118
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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