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发明名称
MICROWAVE PLASMA FILM FORMING APPARATUS
摘要
申请公布号
JPH03150840(A)
申请公布日期
1991.06.27
申请号
JP19890288853
申请日期
1989.11.08
申请人
HITACHI LTD
发明人
AZUMA KAZUFUMI;WATANABE TAKESHI
分类号
H01L21/205;H01L31/04
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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