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发明名称
PROCESS AND APPARATUS FOR TREATMENT OF BACKSIDE OF SEMICONDUCTOR WAFER
摘要
申请公布号
EP0392134(A3)
申请公布日期
1991.06.26
申请号
EP19900100711
申请日期
1990.01.15
申请人
APPLIED MATERIALS INC.
发明人
CHANG, MEI;CHENG, DAVID
分类号
C23C8/36;C23C14/02;C23C16/02;H01L21/00;H01L21/306;H01L21/316;H01L21/687;(IPC1-7):C23C16/02;H01J37/32
主分类号
C23C8/36
代理机构
代理人
主权项
地址
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