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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03149810(A)
申请公布日期
1991.06.26
申请号
JP19890289431
申请日期
1989.11.07
申请人
MATSUSHITA ELECTRON CORP
发明人
OKUDA YOSHIMITSU
分类号
G03F7/42;H01L21/027;H01L21/26;H01L21/265
主分类号
G03F7/42
代理机构
代理人
主权项
地址
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