Electrical probe incorporating scanning proximity microscope.

摘要

An electrical probe which incorporates a scanning proximity microscope (9) for probing the sub-micron features of an integrated circuit (2). An optical microscope (6) is provided to find the general region of interest, and a piezoelectric tube scanner (10) which controls the position of the probe is disposed at an acute angle to the substrate (2), so as not to obscure the view of the optical microscope (6). A number of such probes may be located around the integrated circuit (2).