| 摘要 |
<p>PURPOSE:To enable a wafer to be machined and a wafer carrier to be recognized regardless of the state of the surface of the wafer carrier by burying a recognition symbol composed of a material having an X-rays transmission rate different from that of the wafer carrier into the wafer carrier. CONSTITUTION:In an identification method of a wafer carrier 2 for storing a wafer 1, a recognition symbol 3 which is made of a material having an X-rays transmission rate different from that of the wafer carrier 2 is buried into the wafer carrier 2, X rays 5 are irradiated, and the above recognition symbol 3 is detected for enabling the wafer carrier 2 to be recognized. For example, the recognition symbol 3 consisting of characters and numbers which are made of a material having an X-rays transmission rate different from that of the wafer carrier 2 is buried into an arbitrary part of the wafer carrier 2. Then, the X rays 5 generated from an X-rays generation source 4 are irradiated to the part of the recognition symbol 3 to enable the transmission image to be reflected onto a fluorescent plate 6. The wafer carrier 2 is recognized by confirming the information of the recognition symbol 3 consisting of characters and numbers based on the transmitted image which is reflected onto the fluorescent plate 6.</p> |
