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发明名称
SUBSTRATE HOLDER
摘要
申请公布号
JPH03150361(A)
申请公布日期
1991.06.26
申请号
JP19890288909
申请日期
1989.11.08
申请人
HITACHI LTD;SHIN MEIWA IND CO LTD
发明人
INABA HIROSHI;KATAOKA HIROYUKI;ABE KATSUO;YAMABE SHINICHI;HIRAMINE MAKOTO
分类号
C23C14/50
主分类号
C23C14/50
代理机构
代理人
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地址
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