| 摘要 |
The novel polycrystalline, unorientated or X-ray amorphous carbide, oxide and/or nitride ceramics which are formed by the elemental composition I Ge1-xMx (I> in which the indices and the variables have the following meanings: M is at least one element from the group comprising titanium, zirconium, hafnium, thorium, scandium, yttrium, lanthanum, cerium, praseodymium, neodymium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, vanadium, niobium, tantalum, chromium, molybdenum, tungsten, manganese, rhenium, iron, cobalt, nickel, ruthenium, rhodium, copper, zinc, magnesium, calcium, strontium, barium, boron, aluminium, gallium, indium, thallium, tin, lead, phosphorus, arsenic, antimony, bismuth and tellurium and x is 0.01 to 0.7, can be used in the form of thin layers as diffusion barriers, anticorrosion layers or interference layers, for the protection of surfaces from mechanical abrasion or for the protection of magneto-optical recording layers from corrosion. These novel thin polycrystalline, unorientated or X-ray amorphous layers of germanium ceramics can be produced with the aid of reactive sputtering or reactive magnetron sputtering from a cathode which consists of the abovementioned elemental composition I. |
