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发明名称
FILM CARRIER MANUFACTURING FILM MATERIAL
摘要
申请公布号
JPH03148845(A)
申请公布日期
1991.06.25
申请号
JP19890288341
申请日期
1989.11.06
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
MAKINO YUTAKA;ISHIMOTO KAZUMI;IZUMI YASUO
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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