,申请号JP19820077621-传众专利搜索

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发明名称
摘要
申请公布号	JPH0341785(B2)	申请公布日期	1991.06.25
申请号	JP19820077621	申请日期	1982.05.11
申请人		发明人
分类号	H01L21/66;G01N21/88;G01N21/956	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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