发明名称 Modular convective oven with anti-contamination features
摘要 An oven employing a group of identical modular oven units, each unit divided into a main cavity with a first upper auxiliary chamber and a second lower auxiliary chamber. A barrier plate separating the upper chamber from the main cavity is gas pervious and serves as a filter to separate micron size particles and larger from entering the main chamber as the particles are carried by heated inert gas or air passing into the main cavity. The barrier plate separating the lower chamber from the main cavity is also gas pervious and serves as a sink to adsorb particles of sizes up to 100 microns. The group of modular ovens is partially surrounded by a heat transfer wall which allows heat to be rejected from the modular ovens and removed by a fluid coolant in contact with the wall.
申请公布号 US5025570(A) 申请公布日期 1991.06.25
申请号 US19900600530 申请日期 1990.10.19
申请人 MOFFAT, WILLIAM A. 发明人 MOFFAT, WILLIAM A.
分类号 F26B21/00;F26B21/14;F26B25/06;H01L21/00 主分类号 F26B21/00
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