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经营范围
发明名称
Sputtering apparatus
摘要
申请公布号
US5026470(A)
申请公布日期
1991.06.25
申请号
US19890452984
申请日期
1989.12.19
申请人
INTERNATIONAL BUSINESS MACHINES
发明人
BONYHARD, PETER I.;CHENG, DAVID C.;GLOVER, WILLIAM J.;HENDRIX, HOWARD A.;WARD, ERNEST S.;WILLIAMS, JOHN W.
分类号
C23C14/35;C23C14/50;G11B5/85;G11B5/851;H01F41/18;H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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