发明名称 Automatic developing apparatus
摘要 An improvement in an automatic developing apparatus in which an electroconductive body upon which a predetermined pattern has been written on a resist film applied to a surface of that body, is placed in a solution of developer and containing an electrode, and then the value of the change of the current that flows between the electroconductive body and the electrode is used as the basis for then determining the point at which developing of the written pattern is completed is disclosed. The automatic developing apparatus comprises inclusion section for including an electrolytic substance into the developing solution, detection section for detecting an electroconductive ratio of the developing solution, and control section for controlling the inclusion section so that a value detected by detection section is used as the basis for controlling the electroconductive ratio of the developing solution so that there a developing completion point is clearly indicated.
申请公布号 US5026467(A) 申请公布日期 1991.06.25
申请号 US19900473722 申请日期 1990.02.02
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MATSUOKA, YASUO
分类号 G03F7/26;G03F7/30;H01L21/027;H01L21/30 主分类号 G03F7/26
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