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发明名称
Optical interference position measurement system
摘要
申请公布号
US5026162(A)
申请公布日期
1991.06.25
申请号
US19890349229
申请日期
1989.05.09
申请人
GENERAL ELECTRIC COMPANY, P.L.C.
发明人
LANGDON, ROGER M.
分类号
G01B11/00;G01S3/782
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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