| 摘要 |
The invention concerns a gap arrangement for lattice spectrographs, which permits recording sensitivity to be increased without a deterioration in the resolution. This is achieved by the spectrograph instead of a conventional intake lattice being provided with a number of lattices all of which have a position and a form which fulfil the focusing requirements which are imposed. The increase in the total collected flow of light (through the combined increased lattice surface) gives the spectrograph greater sensitivity. The number of active lattices and the effective individual lattice width can be changed by simply twisting the arrangement. Detection of the spectral pattern which is produced in a lattice spectrograph with this lattice arrangement is carried out by means of two-dimensional detection and automatic data processing. In an application of the invention soft X-ray radiation is recorded at high resolution from a film while a coating is being applied, e.g. by magnetron sputtering, and provides continuous information about the element composition and chemical binding. The invention concerns the field of spectroscopic instruments, in particular lattice spectrographs. The application example given concerns the field of thin film technology within material technology, in particular magnetron sputtering of thin films. <IMAGE> |
