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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03147336(A)
申请公布日期
1991.06.24
申请号
JP19890284952
申请日期
1989.11.02
申请人
NIPPON MINING CO LTD
发明人
TAKANO MAKOTO
分类号
H01L21/306;H01L21/338;H01L29/812
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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