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发明名称	DRY ETCHING APPARATUS
摘要
申请公布号	JPH03148117(A)	申请公布日期	1991.06.24
申请号	JP19890286228	申请日期	1989.11.02
申请人	NEC CORP	发明人	KAWAI KENSHI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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