MANUFACTURE OF LINE COLOR FILTER ARRAY

摘要

PURPOSE:To display an excellent and sharp color image by forming a transparent photoresist film on a transparent substrate and arranging a mirror surface film on the film side, and making stripe-shaped light corresponding to RGB from the side of the transparent substrate and exposing the photoresist film. CONSTITUTION:A normal glass plate is used as the transparent substrate 2, the transparent photoresist film 1 is formed on it, and the mirror surface film 3 is arranged on the film 1 in contact. A metallic film reflecting mirror surface with <=lambda/8 surface accuracy is used as the mirror surface film 3. An exposure device which consists of a white laser 4 and a beam expander 5 irradiates the resist surface 1 with straight light having wavelengths corresponding to R, G, and B through a slit 6 and a diffraction grating 7 to expose the surface and the resist film 1 and mirror surface film 3 are released from contacting each other to obtain the line color filter shown in a figure (f). This filter array has superior quality free from owission of a picture element due to clogging, etc., and displays excellent and sharp color image and is easily increased in area and superior in mass-productivity.