| 摘要 |
PURPOSE:To obtain the metallic parts having holes of ultrafine patterns by forming a ground plate for the master having image patterns from glass, as a base, on which a thin adhesive film is formed by vapor deposition, etc., and remove the above- mentioned film by etching. CONSTITUTION:The glass adhesive material layer 2 consisting of InO2, SnO2, etc., is formed on the surface of the glass 1 having an entirely flawless polished surface of 2 to 3mu flatness at 500 to 5000Angstrom thickness by vapor deposition or a sputtering method. A resist 3 of a photosensitive resin is then applied on the surface of this layer 2 and is coated with a film of prescribed images. The parts to be removed of the exposed resist 3 are removed. The image parts of the patterns corresponding to the hole parts of the fine patterns are formed by an ordinary photomechanical process of utilizing the removal by the etching of the vapor deposited or sputtered material which is exposed. The resist 3 is removed from the layer where the vapor deposited material of the high accuracy images is made to remain by the etching, by which the ground plate for the master is obtd. A metallic layer 4 for the master, such as Ni layer, having a good electrical conductivity and a plating layer 5 for the other metallic parts are formed on the parts which are not the exposed glass parts and are thereafter peeled. |
