SYSTEME DE FORMATION D'UNE IMAGE AYANT UNE SENSIBILITE SUPERIEURE ET PROCEDE POUR SA FABRICATION

摘要

An imaging array (10) of the charge-transfer type having improved sensitivity includes a semiconductor body (12) having a plurality of substantially parallel charge-transfer channels (20) with channel stops (22) therebetween which extend a distance into the semiconductor body (12). At least some of the channel stops (22) have blooming drains (26) therein for the removal of excess photogenerated charge. Buried barrier regions (28) stop the floor of electrical charge, generated by absorption of light in the body (12), into the channels (20) while preventing the loss of such charge by direct flow into the blooming drains (26). The buried barrier regions (28) extend a further distance into the body (12) from those channel stops (22) having blooming drains (26) therein and containing a greater concentration of conductivity modifiers than that contained in the channel stops.