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发明名称
COATING DEVICE
摘要
申请公布号
JPH03145714(A)
申请公布日期
1991.06.20
申请号
JP19890284485
申请日期
1989.10.31
申请人
MITSUBISHI ELECTRIC CORP
发明人
HAYASE IWAO;HAYASHI KAZUO;KASAI NOBUYUKI
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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