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发明名称
NEGATIV ARBEITENDE FOTORESISTMASSE.
摘要
申请公布号
DE3582807(D1)
申请公布日期
1991.06.20
申请号
DE19853582807
申请日期
1985.01.15
申请人
ROHM AND HAAS CO., PHILADELPHIA, PA., US
发明人
KALYANARAMAN, PALAIYUR SUNDARAPPIER, CHALFONT, PA. 18914, US
分类号
C08L79/08;C08L79/04;G03C5/00;G03F7/004;G03F7/008;G03F7/038;H01L21/027;(IPC1-7):G03F7/038
主分类号
C08L79/08
代理机构
代理人
主权项
地址
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