FORMATION OF DIFFUSION MASK LAYER,申请号JP19890284477-传众专利搜索

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发明名称	FORMATION OF DIFFUSION MASK LAYER
摘要
申请公布号	JPH03145721(A)	申请公布日期	1991.06.20
申请号	JP19890284477	申请日期	1989.10.31
申请人	MITSUBISHI ELECTRIC CORP	发明人	SENBA SHINJI
分类号	H01L21/22;H01L31/10	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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