| 摘要 |
<p>PURPOSE:To efficiently inspect the patterns of a reticule by selecting objective lenses according to the density of the image data read via a television camera. CONSTITUTION:A lens controller 12 which controls the rotation of four kinds of the objective lenses 8a to 8d is connected to an image processing controller 10. The lens controller 12 controls the rotation of the objective lenses 8a to 8d in accordance with the output signal of the image processing controller 10 so that the objective lens of an optimum magnification is selected. Namely, the magnification of the television camera 9 is changed according to the pattern density of the read image data and, therefore, the patterns of the respective parts of the reticule are inputted as the image data of nearly a specified range of density. The image data is compared with the previously stored image data. The efficient inspection of the patterns of the reticule is executed in this way.</p> |
