DRYING DEVICE FOR SEMICONDUCTOR WAFER,申请号JP19890283344-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	DRYING DEVICE FOR SEMICONDUCTOR WAFER
摘要
申请公布号	JPH03142930(A)	申请公布日期	1991.06.18
申请号	JP19890283344	申请日期	1989.10.30
申请人	MITSUBISHI ELECTRIC CORP	发明人	OGUSHI TETSURO;KOTO SATORU;OMORI MASASHI;KABASAWA MASAYA
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

您可能感兴趣的专利

METHOD OF PESTICIDES REMOVAL FROM CONTAMINATED WATERS

CONNECTION OF OVERLOAD PROTECTION OR MECHANICAL DAMAGE PROTECTION OF MOTION MECHANISM

METHOD OF PRODUCTS' PRESERVATION STATE DETERMINATION IN GLASS VESSELS

METHOD OF HEXAFLUOROALKANOLES PRODUCTION

IMPACT SEPARATING ELEMENT

METHOD OF MONOAZOPIGMENTS' LACQUERS THERMOSTABILITY INCREASE FOR COLOUR DISPERSIONS PREPARATION

METHOD OF PHENOL WATERS TREATMENT AND EQUIPMENT FOR REALLIZATION OF THIS METHOD

MAGAZINE FOR PULSE CONVERTER'S ELECTRONIC CONTROL

MIXTURE OF POLYURETANES' AND POLYVINYL ALCOHOL'S AQUEOUS DISPERSION FOR SHAM LEATHERS' COVER LAYER FORMATION

MEASURING TIP ESPECIALLY FOR ELECTRIC QUANTITIES MEASURING

CONNECTING ELEMENT FOR HIGH-FREQUENCY ENERGY TRANSMISSION INTO VACUUM

CONNECTION FOR FAULTY REPEATER REMOTE DETERMINATION

METHOD OF 2-CHLORO-3-/4-CHLOROPHENYL/ METHYL PROPIONATE PREPARATION

METHOD OF LUMINESCENT BACTERIA PRESERVATION BY MEANS OF LYOPHILIZATION

ACID AMMONIUM SALTS OF POLYHYDRIC CARBOXYL ALIPHATIC ACIDS AND METHOD OF THEIR PREPARATION

METHOD OF 3-PHENYLALKANALES PREPARATION

DEVICE FOR VIBRATION TRANSFER REDUCTION

RADIAL ROTATING VENTILATOR'S WHEEL

LARGE-DIAMETER WELDED ROLLER ESPECIALLY FOR EARTH OVERBURDEN LARGE-SIZE MACHINES