发明名称 Method to control the thickness of an antireflection coating and implementation installation
摘要 Method to control the thickness of an antireflection coating. According to the invention, the semi-conductive structure (14) is fed with a constant current (16) and the voltage (24) is measured at its terminals. This voltage passes through a maximum when the reflectivity of the antireflection coating passes through a minimum. Application for the embodiment of semi-conductive lasers.
申请公布号 US5024853(A) 申请公布日期 1991.06.18
申请号 US19900544876 申请日期 1990.06.28
申请人 ETAT FRANCAIS REPRESENTE PAR LE MINISTRE 发明人 LANDREAU, JEAN;NAKAJIMA, HISAO
分类号 C23C14/54;G01B11/06;H01S5/00;H01S5/028 主分类号 C23C14/54
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