发明名称 |
Method to control the thickness of an antireflection coating and implementation installation |
摘要 |
Method to control the thickness of an antireflection coating. According to the invention, the semi-conductive structure (14) is fed with a constant current (16) and the voltage (24) is measured at its terminals. This voltage passes through a maximum when the reflectivity of the antireflection coating passes through a minimum. Application for the embodiment of semi-conductive lasers.
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申请公布号 |
US5024853(A) |
申请公布日期 |
1991.06.18 |
申请号 |
US19900544876 |
申请日期 |
1990.06.28 |
申请人 |
ETAT FRANCAIS REPRESENTE PAR LE MINISTRE |
发明人 |
LANDREAU, JEAN;NAKAJIMA, HISAO |
分类号 |
C23C14/54;G01B11/06;H01S5/00;H01S5/028 |
主分类号 |
C23C14/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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