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发明名称
CHARGED CORPUSCULAR BEAM LITHOGRAPHY DEVICE
摘要
申请公布号
JPH03142916(A)
申请公布日期
1991.06.18
申请号
JP19890282439
申请日期
1989.10.30
申请人
JEOL LTD
发明人
ISOBE MORIYUKI;NAKAZAWA HIROYUKI
分类号
H01L21/67;H01L21/027;H01L21/68
主分类号
H01L21/67
代理机构
代理人
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地址
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