发明名称 NARROW-BAND LASER EQUIPMENT
摘要 PURPOSE:To improve contrast when a pattern is projected, by arranging a polarizing element on the axis connecting a first total reflection mirror and a semitransparent mirror. CONSTITUTION:A polarizing element 6 is arranged on the axis connecting a first total reflection mirror 3 and a semitransparent mirror 4. Thereby monochromatic component out of laser light outputted from an optical resonator is polarized in the direction vertical to a plane containing the optical resonator 1. On the other hand, non-monochromatic components having wide bandwidth is subjected to random polarization. By introducing this output into the polarizing element 6, monochromatic component only can be selectively led out. Thereby contrast is improved when a pattern is projected.
申请公布号 JPH03142979(A) 申请公布日期 1991.06.18
申请号 JP19890282102 申请日期 1989.10.30
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 WANI KOICHI;SHIMADA YASUHIRO;KAWAHARA HIDETO;MIMASU MUTSUMI;MIKI TADAAKI
分类号 H01S3/08;G03F7/20;H01L21/027 主分类号 H01S3/08
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