发明名称 |
NARROW-BAND LASER EQUIPMENT |
摘要 |
PURPOSE:To improve contrast when a pattern is projected, by arranging a polarizing element on the axis connecting a first total reflection mirror and a semitransparent mirror. CONSTITUTION:A polarizing element 6 is arranged on the axis connecting a first total reflection mirror 3 and a semitransparent mirror 4. Thereby monochromatic component out of laser light outputted from an optical resonator is polarized in the direction vertical to a plane containing the optical resonator 1. On the other hand, non-monochromatic components having wide bandwidth is subjected to random polarization. By introducing this output into the polarizing element 6, monochromatic component only can be selectively led out. Thereby contrast is improved when a pattern is projected. |
申请公布号 |
JPH03142979(A) |
申请公布日期 |
1991.06.18 |
申请号 |
JP19890282102 |
申请日期 |
1989.10.30 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
WANI KOICHI;SHIMADA YASUHIRO;KAWAHARA HIDETO;MIMASU MUTSUMI;MIKI TADAAKI |
分类号 |
H01S3/08;G03F7/20;H01L21/027 |
主分类号 |
H01S3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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