| 摘要 |
PURPOSE:To perform high reliability and a reduction in size by providing split micro driving electrodes on piezoelectric ceramics having no cavity, no crack, and driving electrode forming surface with sufficient smoothness and flatness. CONSTITUTION:PZT ceramics 1 made of hot hydrostatically molded material or hot uniaxially molded material having no cavity are polished to form mirror- polished driving electrode forming surfaces 2, 2' having no crack at the time of molding due to removal of particles from the surface cavity and cavities as starting point, and excellent smoothness and flatness. Entire polarizing electrodes are formed on the surfaces 2, 2', polarized, unnecessary parts of the entire surface electrodes are removed, and split driving electrodes 3 are formed. A voltage is partly applied to the electrodes 3 to generate local slip deformation at the ceramics 1 and to be operated as an actuator. Thus, reliability is enhanced, and a reduction in size is performed. |
