MEASUREMENT OF MORPHOLOGICAL VALUE USING IMAGE RECOGNITION EQUIPMENT

摘要

PURPOSE:To obtain a correct measured value by using a morphological value obtained by measuring an object to be measured with an image recognition equipment and a correction coefficient determined previously to perform a fine correction at each measuring position within a field of view of recognizing images. CONSTITUTION:An object to be measured finely is moved within a field of view of recognizing images with an XY table 11 and an objective lens 29 is moved with an objective lens focusing motor 21 to focus. After the focusing, an outside dimension value of the object to be measured finely or a coordinate data of an area value thereof is detected with an image recognition equipment 30 and corrected with a microprocessor 22 and a corrector 13 using a correction coefficient determined previously thereby obtaining a correct data.