| 摘要 |
PURPOSE:To reduce the cost of the title electrode, to make the performance thereof stable and to facilitate handling thereof by providing an insulating film which covers and insulates a titanium nitride electrode except a sensitive part, and an ion-selective film which covers the sensitive part of the titanium nitride electrode at least. CONSTITUTION:A material having insulative and heat-resistive properties is selected for an electrode support base 1 and the material of appropriate dimensions for operation is used. A working electrode 2 is formed of a titanium nitride film of a thickness 1 mum on the whole surface of the electrode support base 1. A platinum thin film 3 is formed on the working electrode 2, while grooves 4 are formed in the electrode support base 1, and the platinum thin film 3 forms a connecting part for a lead wire. The grooves 4 are provided for dividing the electrode support base 1 into separate bases 1 later and they are formed by dicing from the working electrode 2 side. After an insulative protection film 5 is formed on the electrode support base 1, the base 1 is divided into separate electrode support bases 1 along the grooves 4. Moreover, an ion-selecting film 7 is formed on each of the electrode support bases 1 and a sensitive part 2a of the working electrode is covered therewith. According to this constitution, it is possible to reduce the cost of the electrode and to make the performance thereof stable. |
