SPECTROSCOPIC ANALYZING DEVICE AND METHOD

摘要

PURPOSE: To achieve spectral analysis in atom scale by irradiating the surface of a sample with radioactive rays with a selected characteristic wavelength that is absorbed by a specific atom or molecule. CONSTITUTION: An atomic absorption force microscope(APAFM) includes an atomic force microscope(AFM) 10. The ATM 10 is constituted so that it operates in a repulsive force mode. A tungsten chip 12 arranged at the edge of a wire lever 14 is placed on a piezoelectric converter 16. The converter 16 is driven by an AC power supply 16a and vibrates a chip with the resonance frequency of the wire lever 14 along Z axis. The wire lever 14 operates as a cantilever. Also, a laser heterodyne interferometer 18 accurately measures the amplitude of AC vibration. Also, the combination bodies 12 and 14 of the chip and the lever are connected also to a proper piezoelectric converter so that they move in parallel along X and Y axes that are in parallel with a surface 24a of a sample 24, thus achieving the spectral analysis according to atom scale.