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发明名称
ION IMPLANTER
摘要
申请公布号
JPH03138849(A)
申请公布日期
1991.06.13
申请号
JP19890276765
申请日期
1989.10.23
申请人
NISSIN ELECTRIC CO LTD
发明人
NAITO KATSUO
分类号
H01J49/10;G01N27/62;H01J37/05;H01J37/317;H01J49/26
主分类号
H01J49/10
代理机构
代理人
主权项
地址
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