| 摘要 |
<p>PURPOSE:To maintain the uniformity of spraying by forming the base-side opening of an exhaust hole at an upper part to larger area than the opposite- side opening connecting with said opening. CONSTITUTION:The spray processing includes a base 2 where an object 1 of spray processing is mounted, a spray nozzle 3 which sprays liquid on the base 2, and a side wall which is arranged at the periphery of the base 2 and has plural exhaust holes 41 - 46. Then the openings of the exhaust holes 41 - 46 on the side of the base 2 are formed at the upper part to the larger area than the opposite-side openings connecting with said openings. Therefore, chemicals which are sprayed and reach the side wall are discharged from the exhaust holes 41 - 46 and never splashed onto the object 1. Consequently, a mask of excellent surface quality which has highly accurate pattern size can be manufactured at high yield.</p> |
