发明名称 Locating reference points in interferometer - by additional evaluation of white light interference and null crossing evaluation of direct component-free signals
摘要 The method of producing null points in interferometric arrangements involves performing additional evaluation of white light interference signals. The direct component-free white light signal null crossing following the global max. is detected form the signal's rising edge having a higher potential than the preceding one. Digital signals produced from null crossings are combined sequentially so that pref. the third null crossing following the last rising edge pulse is used for reference point detection. USE/ADVANTAGE - For precise reference point location on a path of motion, e.g. in incremental length measurement system, over wide dynamic range.
申请公布号 DE4035285(A1) 申请公布日期 1991.06.13
申请号 DE19904035285 申请日期 1990.11.07
申请人 TECHNISCHE HOCHSCHULE ILMENAU, O-6300 ILMENAU, DE 发明人 JAEGER, GERD, PROF. DR.SC.TECHN.;FUESSL, ROLAND, DR.-ING., O-6300 ILMENAU, DE;KLICKERMANN, THOMAS, DR.-ING., O-6800 SAALFELD, DE;NITZSCHE, THOMAS, DIPL.-ING., O-4220 LEUNA, DE
分类号 G01B9/02;G01D5/26 主分类号 G01B9/02
代理机构 代理人
主权项
地址